Cobalt Tantalum Zirconium (CoTaZr) target is used in semiconductor, integrated circuits and micro inductor.
| Symbol | : | CoTaZr |
| Composition | : | Co4.5Ta4Zr Other compositions available |
| Purity | : | 3N5+ |
| Form | : | Planar |
| Color / Appearance | : | Silver white |
| Typical Density | : | 8.68g/cm? |
| Typical Dimension | : | Square: 600mm*130mm*12mm Round: Φ440mm Other dimensions available |
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