Aluminum Scandium (AlSc) target is mainly used in semiconductor, integrated circuits and micro motors.
Symbol | : | AlSc |
Composition | : | Al 9.6at%Sc; Al 20at%Sc; Al 30at%Sc Other compositions available |
Purity | : | 3N5+ |
Form | : | Planar |
Color / Appearance | : | Grey, solid |
Typical Density | : | >2.92g/cm? |
Typical Dimension | : | Φ332mm Other dimensions available |